wavelength_min
float32
1.26k
1.52k
wavelength_max
float32
1.53k
1.63k
group_index_min
float32
1.5
2.5
group_index_max
float32
1.5
2.5
chromatic_dispersion
float32
0.1
20
mode_group_delay_min
float32
0.1
2
mode_group_delay_max
float32
0.11
2.5
effective_index_at_min
float32
1.4
2
effective_index_at_max
float32
1.4
2
effective_index_change
float32
-0.6
0.6
waveguide_material
stringclasses
5 values
cladding_material
stringclasses
2 values
propagation_loss_min
float32
0.1
3
propagation_loss_max
float32
0.2
4.5
measurement_method
stringclasses
4 values
measurement_uncertainty
float32
0.1
5
temperature
float32
20
80
signal_bandwidth
float32
10
100
device_length
float32
1
50
material_dispersion
float32
0.05
10
waveguide_dispersion
float32
-9.85
19.9
1,324
1,540.5
1.90704
2.1844
0.35
1.296
1.553
1.94191
1.49405
-0.44786
Silicon Dioxide (SiO₂)
Air
1.114
1.689
FDTD Simulation
4.11
28.1
58.700001
44.299999
2.891
-2.541
1,385.5
1,565.300049
2.48487
2.49526
9.07
1.158
1.351
1.46405
1.8457
0.38165
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.724
2.469
Optical Time Domain Reflectometry (OTDR)
0.62
63.5
72.900002
38.400002
9.967
-0.897
1,451.400024
1,612.900024
2.45822
2.44338
7.64
0.3
0.469
1.85236
1.75839
-0.09397
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.829
1.778
Frequency Domain Reflectometry
2.12
45.200001
66.5
12.1
9.546
-1.906
1,470.800049
1,601.400024
1.82897
1.8535
0.86
1.073
1.322
1.76906
1.47691
-0.29215
SU-8
Silicon Dioxide (SiO₂)
0.291
1.525
Ring Resonator Q-Factor
2.79
68.699997
14.4
42.200001
3.83
-2.97
1,459.599976
1,611.199951
1.57523
1.73808
6.61
0.381
0.624
1.93306
1.88214
-0.05092
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
2.61
3.235
Optical Time Domain Reflectometry (OTDR)
3.44
71.300003
54.700001
39.799999
3.95
2.66
1,466.800049
1,622.599976
1.9992
2.39878
10.79
0.229
0.491
1.87083
1.8071
-0.06373
Polymethyl Methacrylate (PMMA)
Air
2.438
3.253
Frequency Domain Reflectometry
0.95
59.700001
99
3.3
9.05
1.74
1,432.5
1,531.199951
2.15422
2.21421
4.65
0.967
1.161
1.88443
1.69976
-0.18467
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.234
3.71
FDTD Simulation
4.19
45.099998
46.799999
3.2
8.74
-4.09
1,263.900024
1,559.5
2.08974
1.52643
12.88
1.145
1.199
1.95948
1.40904
-0.55044
Silicon Nitride (Si₃N₄)
Air
1.692
2.791
Frequency Domain Reflectometry
1.61
53.200001
75.800003
46.900002
5.595
7.285
1,323.800049
1,538.599976
1.99532
2.29495
9.32
1.212
1.448
1.72988
1.48018
-0.2497
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.901
3.952
Optical Time Domain Reflectometry (OTDR)
0.72
43.799999
32.099998
31.6
5.469
3.851
1,262.5
1,552.099976
1.66486
1.77364
1.33
1.6
1.906
1.566
1.81763
0.25163
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.171
2.591
Frequency Domain Reflectometry
0.22
54.900002
76.699997
40.400002
1.032
0.298
1,418.300049
1,550.900024
2.14703
2.17322
12.38
0.243
0.297
1.88798
1.60417
-0.28381
Polymethyl Methacrylate (PMMA)
Air
1.367
2.119
Ring Resonator Q-Factor
4.8
26.6
64.5
27.6
1.26
11.12
1,461.300049
1,546.599976
1.89865
1.94741
3.07
1.604
1.719
1.88959
1.95257
0.06298
Polymethyl Methacrylate (PMMA)
Air
1.027
2.482
FDTD Simulation
0.82
65.099998
94.699997
17
5.139
-2.069
1,420.099976
1,587
2.09583
2.13965
13.26
1.106
1.44
1.53035
1.45178
-0.07857
Silicon Nitride (Si₃N₄)
Air
2.682
3.316
FDTD Simulation
4.54
56.200001
12.3
37.900002
4.814
8.446
1,429.400024
1,586.400024
1.71402
1.7031
0.15
1.25
1.368
1.63882
1.40501
-0.23381
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.874
3.042
Frequency Domain Reflectometry
1.56
54.200001
37.799999
46.099998
3.373
-3.223
1,358.199951
1,600.800049
1.71606
2.01804
18.98
1.531
1.787
1.55068
1.8343
0.28362
Polydimethylsiloxane (PDMS)
Air
0.703
1.701
Frequency Domain Reflectometry
1.11
30
82.900002
18.200001
4.779
14.201
1,348.400024
1,619.400024
2.0533
2.08902
12.77
0.725
1.028
1.97774
1.99369
0.01595
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.786
1.566
Frequency Domain Reflectometry
4.07
34.200001
90.699997
48.299999
7.827
4.943
1,421.800049
1,612.5
1.74861
2.27231
5.77
1.176
1.208
1.85112
1.43145
-0.41967
Silicon Nitride (Si₃N₄)
Air
0.566
0.993
Optical Time Domain Reflectometry (OTDR)
2.54
34.700001
39.200001
36.700001
9.311
-3.541
1,292.099976
1,538.699951
1.99846
2.34103
13.5
0.122
0.578
1.92067
1.72692
-0.19375
Polymethyl Methacrylate (PMMA)
Air
2.371
3.02
Frequency Domain Reflectometry
3.83
57.700001
33.799999
45.299999
4.932
8.568
1,464
1,570.699951
2.35053
2.48546
6.03
1.854
2.269
1.41467
1.44329
0.02862
Polydimethylsiloxane (PDMS)
Air
2.421
3.481
FDTD Simulation
2.78
53.299999
91
41.200001
1.715
4.315
1,295.699951
1,605.400024
2.12707
2.02087
0.84
0.64
0.999
1.56048
1.83687
0.27639
SU-8
Silicon Dioxide (SiO₂)
0.647
1.024
Optical Time Domain Reflectometry (OTDR)
0.83
57
46.599998
14.6
0.245
0.595
1,363.800049
1,581.300049
1.64838
1.82825
10.48
1.329
1.8
1.75037
1.50877
-0.2416
Silicon Nitride (Si₃N₄)
Air
1.913
2.346
FDTD Simulation
2.59
42.299999
70.599998
2.2
7.934
2.546
1,290.5
1,556.5
1.6833
2.21799
8.13
0.988
1.27
1.65907
1.96102
0.30195
Polymethyl Methacrylate (PMMA)
Air
2.022
2.581
FDTD Simulation
2.6
74.300003
19.6
45.900002
6.611
1.519
1,344.699951
1,587.199951
1.64269
1.6072
17.690001
1.914
1.969
1.79826
1.52383
-0.27443
Silicon Dioxide (SiO₂)
Air
1.549
2.849
Optical Time Domain Reflectometry (OTDR)
0.45
28.200001
43.200001
1.5
3.382
14.308
1,353.699951
1,583.199951
1.62343
2.40766
6.15
1.667
1.7
1.90838
1.7493
-0.15908
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.657
1.963
Optical Time Domain Reflectometry (OTDR)
3.61
74.199997
63.700001
4.9
3.495
2.655
1,387.900024
1,580
2.27637
2.03897
11.29
1.986
2.045
1.48499
1.66553
0.18054
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.457
2.647
Frequency Domain Reflectometry
2.62
56
93.199997
24.200001
5.614
5.676
1,496.199951
1,618
2.31025
1.68229
3.59
0.58
0.739
1.46376
1.94042
0.47666
Silicon Dioxide (SiO₂)
Air
2.998
3.513
FDTD Simulation
4.69
48.099998
67.900002
40.099998
7.24
-3.65
1,489.699951
1,533.400024
1.97811
1.91001
9.63
0.471
0.894
1.6682
1.8591
0.1909
SU-8
Air
0.16
1.34
Optical Time Domain Reflectometry (OTDR)
4.64
22.299999
98
4.5
8.769
0.861
1,469.599976
1,564.599976
2.30071
2.27082
11.66
1.42
1.892
1.55858
1.45211
-0.10647
Silicon Dioxide (SiO₂)
Air
2.405
2.924
Frequency Domain Reflectometry
4.12
62.299999
65
40.400002
9.526
2.134
1,431.099976
1,614.699951
2.30974
2.20983
3.04
1.127
1.595
1.73818
1.49369
-0.24449
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.78
1.708
Frequency Domain Reflectometry
4.56
38.200001
87
24.1
4.217
-1.177
1,469.099976
1,616
2.07905
1.63336
8.5
0.688
1.177
1.7121
1.41148
-0.30062
Silicon Dioxide (SiO₂)
Air
0.356
0.903
Optical Time Domain Reflectometry (OTDR)
1.4
75.599998
25.9
26.6
9.125
-0.625
1,499.099976
1,621.599976
2.29384
2.42742
19.280001
0.582
0.851
1.66038
1.71474
0.05436
Silicon Dioxide (SiO₂)
Air
1.028
2.239
FDTD Simulation
0.11
66.400002
43.099998
8.2
5.595
13.685
1,363.599976
1,580.099976
2.07553
1.76645
6.99
0.904
0.962
1.94404
1.42952
-0.51452
Polymethyl Methacrylate (PMMA)
Air
1.18
1.88
FDTD Simulation
2.4
57.5
16.299999
20.799999
7.627
-0.637
1,421.5
1,612.099976
1.79228
2.01292
2
1.192
1.555
1.90737
1.92037
0.013
SU-8
Silicon Dioxide (SiO₂)
1.214
2.545
Frequency Domain Reflectometry
0.87
56.599998
54.700001
28.6
6.382
-4.382
1,468.800049
1,617.5
1.93133
2.18037
14.05
1.929
2.192
1.61843
1.64421
0.02578
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.817
1.985
Ring Resonator Q-Factor
3.84
29.799999
79.800003
32.599998
3.159
10.891
1,398.099976
1,596.599976
1.95328
1.59052
17.129999
1.451
1.857
1.46167
1.54983
0.08816
Silicon Nitride (Si₃N₄)
Air
2.48
3.024
Ring Resonator Q-Factor
0.4
75.099998
33.299999
4.7
9.477
7.653
1,287.800049
1,618.5
1.97885
1.9455
8.6
0.391
0.845
1.50311
1.87313
0.37002
Polymethyl Methacrylate (PMMA)
Air
1.611
3.027
Frequency Domain Reflectometry
3.61
70.300003
85.900002
23.799999
7.43
1.17
1,268.900024
1,590.5
1.59687
2.05255
12.6
1.125
1.591
1.40101
1.44296
0.04195
SU-8
Air
2.637
3.817
FDTD Simulation
4.02
64.800003
87.400002
20.799999
2.494
10.106
1,321.900024
1,610.900024
1.95617
2.46728
3.98
0.405
0.808
1.90541
1.44809
-0.45732
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.352
1.689
Optical Time Domain Reflectometry (OTDR)
2.03
47
14.1
46.299999
9.598
-5.618
1,294.900024
1,554.300049
1.96065
1.78213
9.7
0.8
1.27
1.91173
1.98118
0.06945
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.998
3.405
Ring Resonator Q-Factor
1.11
74
21.700001
10.1
3.282
6.418
1,499.900024
1,538.699951
1.75009
1.82435
3.8
1.806
2.182
1.51646
1.85878
0.34232
SU-8
Air
0.142
1.468
FDTD Simulation
0.58
30.1
15.8
13.5
3.001
0.799
1,408.099976
1,562.699951
1.59576
1.62747
2.94
0.191
0.329
1.80997
1.9023
0.09233
SU-8
Silicon Dioxide (SiO₂)
1.469
1.893
Ring Resonator Q-Factor
2.37
43.099998
96.599998
49.200001
0.095
2.845
1,482.300049
1,610.199951
2.41279
2.17095
7.5
0.345
0.762
1.81752
1.794
-0.02352
SU-8
Air
0.173
1.607
Ring Resonator Q-Factor
2.78
25.4
30.200001
14.4
6.355
1.145
1,341.199951
1,604.800049
1.77002
1.71059
18.049999
0.483
0.924
1.68677
1.49034
-0.19643
SU-8
Silicon Dioxide (SiO₂)
2.675
3.647
Ring Resonator Q-Factor
3.06
31.5
45.700001
43.099998
9.622
8.428
1,404.699951
1,543.5
2.09029
1.54981
18.620001
0.441
0.486
1.78919
1.48409
-0.3051
SU-8
Air
2.324
3.758
Frequency Domain Reflectometry
1.72
68.199997
28
6.9
0.945
17.674999
1,485.300049
1,565.900024
1.76576
1.85499
9.47
1.568
1.793
1.67607
1.76793
0.09186
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.829
2.36
Ring Resonator Q-Factor
1.91
55.700001
20.4
25.299999
2.246
7.224
1,447.099976
1,580.099976
1.9874
1.79971
7.03
1.472
1.5
1.58727
1.46704
-0.12023
SU-8
Air
1.064
1.78
Frequency Domain Reflectometry
4.83
74
80
10.4
7.488
-0.458
1,485.900024
1,585
1.94153
1.52094
19.02
0.621
1.055
1.46973
1.57352
0.10379
Polydimethylsiloxane (PDMS)
Air
1.387
1.506
Frequency Domain Reflectometry
0.14
48.799999
54.599998
45.299999
3.482
15.538
1,505.900024
1,569.400024
1.86977
1.82306
15.21
0.564
0.703
1.75534
1.63214
-0.1232
SU-8
Silicon Dioxide (SiO₂)
1.743
3.202
Frequency Domain Reflectometry
3.12
73.300003
56.900002
18.5
2.044
13.166
1,473.199951
1,560.400024
1.9929
2.38884
17.379999
1.284
1.402
1.47635
1.86612
0.38977
SU-8
Air
0.382
1.673
Ring Resonator Q-Factor
1.92
74
37.400002
36.799999
2.282
15.098
1,490.699951
1,559.300049
1.66962
1.89153
6.63
0.431
0.629
1.52455
1.6233
0.09875
Polydimethylsiloxane (PDMS)
Air
2.001
2.824
Optical Time Domain Reflectometry (OTDR)
4.51
23.5
93.800003
25.5
1.058
5.572
1,281.400024
1,621.300049
1.96763
2.03971
12.44
0.727
1.119
1.54736
1.5413
-0.00606
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
2.527
3.577
FDTD Simulation
0.44
53.900002
99
42.400002
3.57
8.87
1,379.900024
1,602.800049
1.94157
2.28991
16.85
0.188
0.236
1.49317
1.40293
-0.09024
Polymethyl Methacrylate (PMMA)
Air
0.931
1.501
Optical Time Domain Reflectometry (OTDR)
4.4
35.900002
11.3
1.9
4.466
12.384
1,350.099976
1,569.300049
2.45304
1.68142
19.65
0.624
0.765
1.72523
1.50916
-0.21607
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.301
3.059
Optical Time Domain Reflectometry (OTDR)
2.61
49.900002
27.6
42.900002
9.412
10.238
1,406.5
1,566.199951
1.5543
1.70921
12.8
1.696
2.024
1.62263
1.77226
0.14963
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.016
2.913
FDTD Simulation
4.52
75.199997
74.699997
37.700001
1.544
11.256
1,397.800049
1,554.099976
2.11052
1.68751
2.67
1.379
1.396
1.70899
1.57732
-0.13167
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.277
2.596
FDTD Simulation
3.25
73.5
10.6
19.9
9.893
-7.223
1,282.699951
1,603.199951
1.70643
2.25436
9.68
0.989
1.399
1.82624
1.95827
0.13203
SU-8
Silicon Dioxide (SiO₂)
0.575
1.684
Ring Resonator Q-Factor
2.06
22.4
26
21.6
5.131
4.549
1,389.900024
1,534.300049
1.76144
2.22824
10.7
0.54
1.023
1.97617
1.89611
-0.08006
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.786
3.02
Frequency Domain Reflectometry
3
55.200001
53.700001
31.299999
7.213
3.487
1,454.400024
1,531.099976
1.60097
2.06288
7.38
1.713
1.932
1.82407
1.94483
0.12076
SU-8
Silicon Dioxide (SiO₂)
2.441
3.487
FDTD Simulation
2.11
69.300003
38.700001
14.2
5.13
2.25
1,276.900024
1,579.699951
1.56801
2.49017
1.71
1.065
1.437
1.49821
1.94387
0.44566
Polymethyl Methacrylate (PMMA)
Air
2.626
3.856
FDTD Simulation
4.73
43.400002
23.299999
15
6.491
-4.781
1,260
1,616.699951
2.24967
2.22096
2.64
1.441
1.907
1.82029
1.69757
-0.12272
SU-8
Air
2.53
3.569
Ring Resonator Q-Factor
4.82
61.200001
73
33.5
4.971
-2.331
1,390.800049
1,611
1.7097
1.88855
9.18
0.815
0.84
1.86493
1.69128
-0.17365
SU-8
Silicon Dioxide (SiO₂)
0.446
1.921
FDTD Simulation
1.46
28.700001
31.1
21.9
5.429
3.751
1,314.599976
1,587.699951
2.04255
2.21212
19.77
0.463
0.816
1.64493
1.44625
-0.19868
Polydimethylsiloxane (PDMS)
Air
0.921
1.31
FDTD Simulation
1.7
40.599998
31.700001
36.599998
6.633
13.137
1,262.199951
1,575.800049
1.55106
1.68738
5.66
0.503
0.722
1.67775
1.91967
0.24192
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.546
3.704
Ring Resonator Q-Factor
3.26
75.699997
21.5
40.5
1.066
4.594
1,499.099976
1,615.800049
2.09289
2.01544
12.83
0.381
0.743
1.74147
1.42844
-0.31303
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.929
3.722
Frequency Domain Reflectometry
1.32
22.799999
88
22.4
8.589
4.241
1,420.5
1,604.900024
2.35873
2.01561
17.559999
0.487
0.732
1.98667
1.5096
-0.47707
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.289
1.706
Ring Resonator Q-Factor
3.11
20.799999
92.400002
31.6
4.108
13.452
1,446.199951
1,578.300049
2.1778
1.63279
15.9
0.109
0.332
1.43266
1.79886
0.3662
Polydimethylsiloxane (PDMS)
Air
2.862
4.135
Frequency Domain Reflectometry
4.37
40.299999
81.5
36.599998
7.04
8.86
1,289.800049
1,589.199951
1.72736
1.58998
15.31
0.841
1.244
1.89362
1.61276
-0.28086
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.409
3.029
Ring Resonator Q-Factor
0.72
23.5
73.400002
40.799999
5.64
9.67
1,451.599976
1,574.099976
2.32673
1.58171
17.48
1.528
1.758
1.95313
1.97562
0.02249
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.375
1.652
Ring Resonator Q-Factor
3.77
36.799999
89
44.599998
2.73
14.75
1,446.199951
1,611.199951
2.3463
1.79215
13.04
0.538
0.763
1.87378
1.42487
-0.44891
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.611
2.941
Frequency Domain Reflectometry
2.58
26.1
34.5
26.799999
2.613
10.427
1,368.599976
1,589.099976
1.92713
2.46747
9.55
0.878
0.944
1.55597
1.95446
0.39849
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.3
0.597
Optical Time Domain Reflectometry (OTDR)
2.57
47.400002
59.299999
4.9
2.933
6.617
1,285.599976
1,563.300049
1.50577
2.02902
17.969999
1.936
2.282
1.5438
1.671
0.1272
SU-8
Silicon Dioxide (SiO₂)
0.312
1.472
Ring Resonator Q-Factor
0.87
67.699997
49.099998
37.200001
3.972
13.998
1,273.800049
1,591.400024
1.55215
2.41327
14.11
0.333
0.64
1.8077
1.86904
0.06134
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.768
3.59
FDTD Simulation
3.92
20.4
25.1
30.299999
7.307
6.803
1,401.599976
1,560.800049
2.47714
1.9196
17.18
1.442
1.597
1.98701
1.57238
-0.41463
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.493
1.156
Ring Resonator Q-Factor
3
28.200001
28
37.900002
5.525
11.655
1,478.199951
1,557.400024
1.73939
2.03425
1.51
0.731
0.97
1.79384
1.62616
-0.16768
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.338
0.549
Optical Time Domain Reflectometry (OTDR)
1.5
20.4
88.699997
19.6
8.185
-6.675
1,499.5
1,586.199951
1.64939
1.73042
17.41
1.114
1.202
1.5665
1.42403
-0.14247
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.431
1.92
FDTD Simulation
3.65
34.5
41.400002
39.400002
6.887
10.523
1,411.599976
1,590.400024
1.88043
1.97587
15.49
1.872
1.918
1.87121
1.53929
-0.33192
SU-8
Silicon Dioxide (SiO₂)
0.301
1.435
Frequency Domain Reflectometry
4.71
46.599998
84.599998
37.799999
5.681
9.809
1,397.400024
1,622.5
2.04025
2.16977
18.799999
0.357
0.469
1.62977
1.5661
-0.06367
Polydimethylsiloxane (PDMS)
Air
2.762
4.188
Frequency Domain Reflectometry
3.23
66.300003
96
33.900002
2.231
16.569
1,464.300049
1,540
1.95415
2.20892
11.72
0.996
1.059
1.93751
1.88807
-0.04944
Polydimethylsiloxane (PDMS)
Air
0.325
0.682
Optical Time Domain Reflectometry (OTDR)
3.23
55.099998
71
15
5.382
6.338
1,472.599976
1,563.199951
2.4968
1.77008
7.44
1.631
1.774
1.61456
1.47723
-0.13733
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.857
2.883
Frequency Domain Reflectometry
4.23
75.400002
93.900002
43.799999
9.585
-2.145
1,291.5
1,617.699951
1.80399
2.16377
2.31
1.606
1.849
1.69009
1.74057
0.05048
Polydimethylsiloxane (PDMS)
Air
0.502
1.655
FDTD Simulation
3.67
77.199997
17
29.700001
1.134
1.176
1,295.400024
1,561.199951
2.33503
2.23516
19.09
0.827
1.299
1.79069
1.63979
-0.1509
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.986
2.091
FDTD Simulation
1.26
24.4
27
2.3
7.77
11.32
1,439.300049
1,536.400024
1.85127
1.505
13.4
1.983
2.277
1.76832
1.71511
-0.05321
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.841
2.11
Frequency Domain Reflectometry
1.61
75.5
40.599998
31.5
4.866
8.534
1,330.199951
1,584.699951
1.53322
2.07089
1.39
1.306
1.748
1.83878
1.88746
0.04868
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.656
2.101
Frequency Domain Reflectometry
3.19
73.900002
77.099998
15.6
3.392
-2.002
1,422.599976
1,615.5
1.88318
1.81591
3.11
1.54
1.763
1.80239
1.73523
-0.06716
Polydimethylsiloxane (PDMS)
Air
0.28
0.781
FDTD Simulation
4.01
72.199997
91.300003
40
9.792
-6.682
1,461
1,584
1.51654
2.31847
11.78
1.096
1.489
1.8283
1.7088
-0.1195
Silicon Dioxide (SiO₂)
Air
0.288
0.845
FDTD Simulation
0.93
51.5
53.299999
37.799999
9.994
1.786
1,314.5
1,538.599976
2.37568
1.8037
16.879999
0.706
1.013
1.98171
1.65264
-0.32907
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.271
3.728
Optical Time Domain Reflectometry (OTDR)
4.63
53.599998
25
24.9
5.748
11.132
1,268
1,548.400024
2.0619
1.69062
7.69
0.606
1.086
1.86362
1.54721
-0.31641
SU-8
Silicon Dioxide (SiO₂)
2.916
3.203
Frequency Domain Reflectometry
1.81
73.900002
24.1
32.700001
5.157
2.533
1,442.199951
1,545.300049
1.51878
1.97513
1.05
0.407
0.752
1.40019
1.92824
0.52805
Silicon Nitride (Si₃N₄)
Air
2.853
3.995
FDTD Simulation
4.59
53.099998
49
6.1
9.684
-8.634
1,448.800049
1,600.900024
2.01081
2.44109
18.42
1.262
1.443
1.83289
1.73989
-0.093
Polymethyl Methacrylate (PMMA)
Air
1.139
2.56
FDTD Simulation
3.07
21.9
79.900002
35.099998
6.251
12.169
1,437.300049
1,561.900024
2.1145
1.71867
16.969999
0.935
1.422
1.61241
1.87596
0.26355
Polydimethylsiloxane (PDMS)
Air
1.646
2.058
Ring Resonator Q-Factor
4.46
54.799999
27.9
30.299999
7.329
9.641
1,365.300049
1,571.900024
2.46547
1.85804
19.25
1.565
1.646
1.57856
1.51106
-0.0675
Polymethyl Methacrylate (PMMA)
Air
2.759
3.496
FDTD Simulation
1.67
53.099998
22.700001
11.4
9.263
9.987
1,268.599976
1,548.199951
1.53769
1.82729
9.06
1.198
1.609
1.91693
1.73455
-0.18238
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
2.345
3.757
Ring Resonator Q-Factor
1.29
23.1
43.700001
29.700001
6.419
2.641
1,377.800049
1,580.199951
2.13459
2.36202
7.58
1.453
1.732
1.76737
1.52837
-0.239
Silicon Nitride (Si₃N₄)
Air
0.439
1.591
Frequency Domain Reflectometry
0.37
57.599998
32.799999
47.700001
6.638
0.942
1,509.900024
1,538.300049
2.20273
2.21947
13.17
0.693
0.855
1.86285
1.73192
-0.13093
Polydimethylsiloxane (PDMS)
Air
0.793
1.835
Optical Time Domain Reflectometry (OTDR)
2.89
22.299999
71.599998
19.9
9.857
3.313
1,336
1,541.099976
1.73763
2.4311
13.9
0.215
0.653
1.61385
1.95368
0.33983
SU-8
Silicon Dioxide (SiO₂)
0.138
0.788
Frequency Domain Reflectometry
2.72
60.299999
75.400002
27.700001
5.221
8.679
1,410.800049
1,604.300049
2.01721
2.07912
6.28
1.805
2.187
1.61282
1.47472
-0.1381
Polydimethylsiloxane (PDMS)
Air
0.531
1.186
Ring Resonator Q-Factor
1.26
62.5
32.900002
38.799999
0.982
5.298
1,473.699951
1,574.300049
1.54801
2.15275
7.27
0.102
0.441
1.59243
1.42761
-0.16482
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.543
0.855
FDTD Simulation
3.69
72.099998
10.1
5.8
0.95
6.32
1,367.699951
1,541.199951
1.91282
1.53249
9.06
0.128
0.215
1.80868
1.54275
-0.26593
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
2.519
3.52
Ring Resonator Q-Factor
3.66
31.799999
20.799999
35.200001
0.496
8.564
1,461.5
1,609.199951
2.45595
2.26154
19.959999
1.29
1.782
1.69204
1.65839
-0.03365
SU-8
Silicon Dioxide (SiO₂)
2.772
4.015
Optical Time Domain Reflectometry (OTDR)
2.13
29.4
35.599998
23.5
0.229
19.731001
1,263.900024
1,536.400024
2.09957
2.03957
4
1.799
2.249
1.45659
1.68145
0.22486
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.424
1.659
Frequency Domain Reflectometry
4.34
52.299999
21
42.5
2.99
1.01