wavelength_min
float32
1.26k
1.52k
wavelength_max
float32
1.53k
1.63k
group_index_min
float32
1.5
2.5
group_index_max
float32
1.5
2.5
chromatic_dispersion
float32
0.1
20
mode_group_delay_min
float32
0.1
2
mode_group_delay_max
float32
0.11
2.5
effective_index_at_min
float32
1.4
2
effective_index_at_max
float32
1.4
2
effective_index_change
float32
-0.6
0.6
waveguide_material
stringclasses
5 values
cladding_material
stringclasses
2 values
propagation_loss_min
float32
0.1
3
propagation_loss_max
float32
0.2
4.5
measurement_method
stringclasses
4 values
measurement_uncertainty
float32
0.1
5
temperature
float32
20
80
signal_bandwidth
float32
10
100
device_length
float32
1
50
material_dispersion
float32
0.05
10
waveguide_dispersion
float32
-9.85
19.9
1,476.800049
1,531.699951
2.32993
1.55552
17.219999
1.699
2.19
1.75583
1.74119
-0.01464
SU-8
Silicon Dioxide (SiO₂)
2.705
3.523
FDTD Simulation
4.91
40.099998
31.1
8.7
4.052
13.168
1,326.300049
1,571.400024
2.33489
1.85068
15.11
1.155
1.37
1.42562
1.63384
0.20822
Silicon Nitride (Si₃N₄)
Air
0.629
0.989
Ring Resonator Q-Factor
2.88
24
88.699997
20.5
1.429
13.681
1,393.300049
1,586.900024
1.53937
1.98672
12.69
0.832
1.316
1.53759
1.43997
-0.09762
Silicon Nitride (Si₃N₄)
Air
1.594
2.489
Ring Resonator Q-Factor
4.8
21.700001
93
9.5
8.08
4.61
1,494.900024
1,538.400024
2.10209
1.85142
3.76
1.46
1.49
1.56638
1.83275
0.26637
SU-8
Silicon Dioxide (SiO₂)
1.883
2.883
Ring Resonator Q-Factor
4.44
75.5
15.8
17
8.708
-4.948
1,350.5
1,587.800049
2.22771
1.96684
11.3
0.879
1.264
1.9467
1.93596
-0.01074
Polydimethylsiloxane (PDMS)
Air
0.688
1.836
FDTD Simulation
4.19
34.5
53.599998
23.700001
5.154
6.146
1,305.599976
1,573.099976
1.62951
1.74889
0.2
1.256
1.745
1.99923
1.68266
-0.31657
SU-8
Air
0.169
1.478
FDTD Simulation
3.03
33.5
33.400002
11.6
0.581
-0.381
1,266.099976
1,600.199951
1.58279
2.4861
13.54
0.126
0.317
1.82281
1.62708
-0.19573
Silicon Dioxide (SiO₂)
Air
0.186
1.678
Optical Time Domain Reflectometry (OTDR)
3.75
71
57.200001
8.4
5.698
7.842
1,519.5
1,531.400024
2.10856
2.05765
12.92
0.388
0.574
1.78874
1.83704
0.0483
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.846
2.229
FDTD Simulation
4.04
48.700001
84.300003
14.1
9.478
3.442
1,441.300049
1,530.300049
2.46591
1.73357
19.219999
0.481
0.555
1.86331
1.71871
-0.1446
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.688
1.846
Frequency Domain Reflectometry
3.93
26.200001
79.699997
44
6.993
12.227
1,350.300049
1,605.300049
2.21032
2.24498
10.38
1.606
1.973
1.477
1.57521
0.09821
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.088
1.285
Frequency Domain Reflectometry
4.11
66.800003
79.699997
29.9
1.925
8.455
1,385
1,577
1.6312
2.44137
13.31
1.269
1.678
1.41845
1.47913
0.06068
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.261
1.75
Optical Time Domain Reflectometry (OTDR)
3.55
59.799999
22.700001
41.599998
4.53
8.78
1,294.800049
1,569.800049
1.92366
2.44141
17.34
0.823
1.029
1.69522
1.9194
0.22418
Polydimethylsiloxane (PDMS)
Air
1.359
1.699
FDTD Simulation
4.79
56.599998
22.6
27.1
7.09
10.25
1,469.800049
1,554.300049
1.6891
1.92254
11.4
1.599
1.861
1.66366
1.77824
0.11458
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.614
2.039
FDTD Simulation
1.6
33.5
87.599998
32
6.042
5.358
1,351.800049
1,565.599976
1.75241
2.08781
2.02
0.21
0.417
1.87831
1.94673
0.06842
Silicon Nitride (Si₃N₄)
Air
0.282
0.689
FDTD Simulation
1.18
32.900002
11.8
48.200001
3.333
-1.313
1,462.300049
1,624.900024
1.94334
1.57564
15.81
0.53
0.779
1.71349
1.49978
-0.21371
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.522
1.011
FDTD Simulation
0.83
25.700001
29
8.9
6.593
9.217
1,374.400024
1,554.199951
1.72134
1.97436
19.35
1.036
1.065
1.68923
1.8379
0.14867
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.215
2.274
Ring Resonator Q-Factor
4
57.400002
21.4
23.1
1.36
17.99
1,487.5
1,565.300049
2.01219
1.59726
10.6
0.493
0.988
1.699
1.93294
0.23394
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.313
2.654
FDTD Simulation
1.4
78.599998
54.400002
11.8
2.469
8.131
1,420
1,611.800049
1.57385
1.58752
1.75
1.875
2.321
1.90494
1.79002
-0.11492
Polydimethylsiloxane (PDMS)
Air
0.169
0.379
Ring Resonator Q-Factor
3.31
64.5
31.6
24
0.926
0.824
1,311.5
1,543.300049
1.85039
2.24446
5.93
0.683
1.059
1.97037
1.83921
-0.13116
Silicon Nitride (Si₃N₄)
Air
0.527
1.818
Optical Time Domain Reflectometry (OTDR)
0.83
65.099998
15.1
6.1
4.554
1.376
1,425
1,530.300049
2.21078
2.36361
17.709999
0.664
1.09
1.93093
1.46237
-0.46856
SU-8
Air
2.667
3.639
FDTD Simulation
3.65
70
93.599998
15.9
1.187
16.523001
1,273
1,551.5
1.65964
1.78479
12.4
1.028
1.326
1.54776
1.46412
-0.08364
Polydimethylsiloxane (PDMS)
Air
2.15
3.017
FDTD Simulation
0.35
38.599998
78.099998
11.6
7.455
4.945
1,489.400024
1,597.099976
2.1043
2.35063
1.09
1.352
1.791
1.68347
1.47287
-0.2106
Polymethyl Methacrylate (PMMA)
Air
0.275
0.6
Ring Resonator Q-Factor
0.28
68
21.9
16.4
6.543
-5.453
1,516.699951
1,581.199951
1.6329
1.98907
19.200001
1.731
2.103
1.71972
1.58506
-0.13466
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
2.893
3.044
FDTD Simulation
1.14
45.299999
49.5
30.799999
2.516
16.684
1,451.400024
1,609.900024
2.04447
1.64888
14.27
0.798
1.26
1.82784
1.79461
-0.03323
SU-8
Silicon Dioxide (SiO₂)
1.278
2.624
Optical Time Domain Reflectometry (OTDR)
0.5
50.599998
27.4
50
1.952
12.318
1,419.900024
1,610.800049
2.18397
2.21145
5.38
0.46
0.719
1.42001
1.95934
0.53933
Silicon Nitride (Si₃N₄)
Air
1.277
1.937
Frequency Domain Reflectometry
4.14
76.400002
13
27.200001
6.42
-1.04
1,429.400024
1,592.300049
2.19123
2.29769
15.28
0.816
0.903
1.74868
1.94007
0.19139
SU-8
Air
0.679
1.868
Ring Resonator Q-Factor
3.26
44.099998
93.199997
27.5
2.848
12.432
1,387.5
1,555.300049
2.05711
2.32345
10.58
0.483
0.684
1.79237
1.66604
-0.12633
Polymethyl Methacrylate (PMMA)
Air
2.946
4.231
Optical Time Domain Reflectometry (OTDR)
0.65
27.700001
61.799999
29.299999
0.583
9.997
1,334.199951
1,596.400024
2.31292
2.07395
9.86
1.73
1.932
1.76453
1.81563
0.0511
Polymethyl Methacrylate (PMMA)
Air
0.478
0.915
FDTD Simulation
4.39
46.200001
64.699997
5.6
7.365
2.495
1,299.800049
1,534.400024
2.48242
1.99705
13.45
0.59
0.989
1.77439
1.66508
-0.10931
Silicon Nitride (Si₃N₄)
Air
2.304
2.807
FDTD Simulation
3.27
49.299999
85.5
21.299999
7.473
5.977
1,372.099976
1,543.900024
2.28321
1.7573
1.86
0.105
0.146
1.95411
1.9321
-0.02201
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
2.918
3.763
Frequency Domain Reflectometry
2.44
44.799999
89.900002
11.5
5.209
-3.349
1,302.300049
1,558.199951
2.39505
1.86168
4.83
1.12
1.56
1.63181
1.43792
-0.19389
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.326
1.346
Ring Resonator Q-Factor
1.01
67
78.099998
13.7
4.256
0.574
1,275.900024
1,543.400024
1.60135
1.89248
17.42
1.955
2.421
1.8776
1.6208
-0.2568
Silicon Nitride (Si₃N₄)
Air
0.705
0.84
Optical Time Domain Reflectometry (OTDR)
2.02
70.5
85.599998
30.200001
5.662
11.758
1,281.800049
1,575.300049
2.16182
2.47158
9.04
0.413
0.75
1.97724
1.68995
-0.28729
Polydimethylsiloxane (PDMS)
Air
1.325
2.231
Ring Resonator Q-Factor
2.91
61.5
80.199997
24.200001
2.122
6.918
1,396.800049
1,620
1.53645
1.81381
6.41
1.381
1.68
1.56162
1.81166
0.25004
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.599
3.685
Optical Time Domain Reflectometry (OTDR)
2.39
56.099998
77.599998
48.200001
2.076
4.334
1,451.5
1,590.900024
2.22059
1.78122
3.06
1.89
1.91
1.56198
1.76286
0.20088
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.667
1.557
Frequency Domain Reflectometry
0.73
46.099998
24.4
4.9
3.534
-0.474
1,388.800049
1,621.5
2.33475
2.30408
12.09
1.884
2.248
1.99647
1.5514
-0.44507
Polymethyl Methacrylate (PMMA)
Air
1.365
2.36
Ring Resonator Q-Factor
4.97
42.200001
82.699997
46.700001
2.928
9.162
1,403.5
1,591.300049
2.37073
1.86132
7.57
1.473
1.635
1.66316
1.56263
-0.10053
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
2.033
3.002
Frequency Domain Reflectometry
1.93
21.1
40.200001
37.799999
8.084
-0.514
1,436.300049
1,622.900024
1.52066
1.6674
7.51
1.079
1.554
1.9719
1.88716
-0.08474
SU-8
Silicon Dioxide (SiO₂)
2.963
4.041
Frequency Domain Reflectometry
0.95
51.099998
90.099998
45.400002
1.916
5.594
1,371.599976
1,548.400024
1.84414
2.19601
19.15
1.047
1.373
1.42013
1.67454
0.25441
SU-8
Air
0.657
1.689
Frequency Domain Reflectometry
0.39
79.699997
14.7
22
0.536
18.614
1,344.900024
1,557.400024
1.89638
2.36974
16.940001
0.629
0.977
1.76247
1.53854
-0.22393
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
2.892
3.287
FDTD Simulation
3.71
75.900002
81.599998
32.099998
9.58
7.36
1,332.300049
1,559.5
1.55529
2.01827
1.17
0.906
1.395
1.79739
1.92804
0.13065
SU-8
Silicon Dioxide (SiO₂)
2.543
2.84
Optical Time Domain Reflectometry (OTDR)
4.74
43.099998
88.699997
34.900002
5.066
-3.896
1,468.099976
1,575
1.56488
1.78889
1.65
0.386
0.781
1.47454
1.62257
0.14803
Silicon Nitride (Si₃N₄)
Air
0.826
0.942
Ring Resonator Q-Factor
2.23
42
99.300003
10.8
7.984
-6.334
1,353.300049
1,588.199951
2.4428
2.42324
6.02
1.556
1.647
1.79169
1.97834
0.18665
Polymethyl Methacrylate (PMMA)
Air
0.787
1.839
Frequency Domain Reflectometry
1.66
74.599998
88.900002
24.200001
2.436
3.584
1,514
1,538.400024
1.56017
1.61105
3.48
1.095
1.418
1.9932
1.45236
-0.54084
SU-8
Air
1.633
2.884
Optical Time Domain Reflectometry (OTDR)
1.29
66.699997
32.400002
21.4
3.724
-0.244
1,358.599976
1,622.300049
1.7339
1.69696
1.81
1.041
1.45
1.92681
1.98288
0.05607
Polydimethylsiloxane (PDMS)
Air
0.536
2.016
FDTD Simulation
0.79
44.099998
46
12.6
5.292
-3.482
1,466.199951
1,596
1.88314
1.66664
2.96
1.031
1.105
1.95007
1.55691
-0.39316
Silicon Nitride (Si₃N₄)
Air
2.388
3.875
Ring Resonator Q-Factor
2.79
39.900002
24.5
13.2
5.529
-2.569
1,455.099976
1,590.400024
2.06872
1.81522
6.11
1.461
1.876
1.84724
1.52094
-0.3263
Polymethyl Methacrylate (PMMA)
Air
0.397
1.621
Ring Resonator Q-Factor
2.24
36.200001
17.299999
11.9
0.735
5.375
1,410.400024
1,535.699951
1.93119
1.68936
1.24
1.514
2.014
1.75
1.56059
-0.18941
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.976
1.784
Ring Resonator Q-Factor
0.91
39.099998
78.599998
33.700001
8.994
-7.754
1,374.400024
1,549.599976
1.89572
1.61417
19.52
0.342
0.528
1.61913
1.50259
-0.11654
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.499
1.915
Optical Time Domain Reflectometry (OTDR)
3.91
75.300003
43.200001
24
2.24
17.280001
1,448.5
1,576.5
2.25124
1.57198
19.309999
0.904
1.402
1.52477
1.76001
0.23524
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.522
1.82
Optical Time Domain Reflectometry (OTDR)
3.99
63.799999
13
15.9
6.507
12.803
1,454.300049
1,572.599976
2.36034
2.05074
19.629999
1.547
1.937
1.5858
1.74183
0.15603
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.403
1.824
Optical Time Domain Reflectometry (OTDR)
4.44
63.299999
50.299999
36.299999
2.788
16.841999
1,288.900024
1,622.900024
1.56442
1.62851
9.22
1.507
1.672
1.63758
1.89434
0.25676
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.403
0.901
FDTD Simulation
4.02
49.700001
41.700001
15.1
1.443
7.777
1,413.099976
1,597.400024
1.81863
1.97805
1.63
1.737
2.15
1.54406
1.75339
0.20933
Polymethyl Methacrylate (PMMA)
Air
2.363
3.434
FDTD Simulation
4.99
43.400002
98.199997
13.1
0.309
1.321
1,329.199951
1,590.099976
2.36801
1.80555
2.48
0.156
0.568
1.48308
1.87062
0.38754
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.515
2.94
Frequency Domain Reflectometry
2.44
32
97
49.400002
3.501
-1.021
1,448.400024
1,593.5
1.84129
2.36296
9.43
0.286
0.53
1.78382
1.56381
-0.22001
SU-8
Silicon Dioxide (SiO₂)
2.524
2.89
Frequency Domain Reflectometry
1.62
76.800003
45.700001
44.299999
3.517
5.913
1,349
1,609.599976
1.99852
1.74819
17.6
1.562
1.87
1.98044
1.43294
-0.5475
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.733
2.428
Ring Resonator Q-Factor
1.02
44.099998
52.099998
34.799999
2.128
15.472
1,476
1,611.099976
1.86426
1.75216
8.01
0.641
0.69
1.5029
1.51362
0.01072
Silicon Dioxide (SiO₂)
Air
0.234
1.473
FDTD Simulation
0.94
33.700001
50.299999
21.6
6.569
1.441
1,405.800049
1,557.199951
1.89547
1.66953
14.28
1.742
2.117
1.56452
1.49686
-0.06766
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.355
1.636
Optical Time Domain Reflectometry (OTDR)
4.67
39.799999
20.6
38.099998
6.402
7.878
1,328.099976
1,624.800049
2.49017
1.67223
5.38
1.185
1.452
1.68848
1.77489
0.08641
Polydimethylsiloxane (PDMS)
Air
1.442
2.39
Ring Resonator Q-Factor
3.12
31.5
16.5
17
6.104
-0.724
1,299.699951
1,542.300049
1.55944
1.65053
4.26
0.786
1.177
1.91721
1.91817
0.00096
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.986
3.339
Ring Resonator Q-Factor
2.5
42.5
83.699997
19.4
4.713
-0.453
1,312.599976
1,624.699951
1.64523
1.5095
15.33
1.141
1.431
1.55653
1.84166
0.28513
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.808
3.483
Ring Resonator Q-Factor
3.97
51.799999
19.299999
11.2
7.81
7.52
1,282
1,581.699951
1.56701
1.84559
6.06
0.209
0.4
1.63782
1.98073
0.34291
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
2.611
3.7
Ring Resonator Q-Factor
3.92
74.099998
34.700001
24.6
1.562
4.498
1,380.5
1,558.5
2.0938
1.73975
1.64
0.73
1.179
1.74376
1.62474
-0.11902
Silicon Nitride (Si₃N₄)
Air
2.632
3.251
FDTD Simulation
3.93
42.400002
32.200001
34.799999
5.183
-3.543
1,316.400024
1,603.800049
1.74138
1.79098
2.9
1.301
1.573
1.83288
1.70971
-0.12317
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.499
0.719
Optical Time Domain Reflectometry (OTDR)
4.38
20.700001
69.599998
37.5
9.024
-6.124
1,382.300049
1,550.599976
1.68092
2.45711
13.96
1.402
1.794
1.81592
1.52247
-0.29345
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
2.629
3.639
FDTD Simulation
0.2
34.599998
70.699997
45.5
0.143
13.817
1,304.5
1,544.699951
1.75926
1.87086
2.47
1.301
1.425
1.51539
1.6479
0.13251
SU-8
Silicon Dioxide (SiO₂)
0.714
1.776
Frequency Domain Reflectometry
1.03
27.700001
88.5
43.900002
3.747
-1.277
1,358.5
1,584.800049
1.52199
1.54306
18.299999
0.991
1.039
1.67777
1.8029
0.12513
Polymethyl Methacrylate (PMMA)
Air
0.449
0.819
Frequency Domain Reflectometry
2.95
71.099998
54.599998
12.2
1.289
17.011
1,479.400024
1,616.5
1.53204
2.20169
14.03
0.74
0.979
1.46123
1.4813
0.02007
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.103
1.079
Optical Time Domain Reflectometry (OTDR)
1.85
54.299999
61.200001
43.5
4.822
9.208
1,411.900024
1,615.599976
1.65853
2.24587
18.84
1.426
1.633
1.76782
1.76186
-0.00596
Silicon Nitride (Si₃N₄)
Air
1.505
2.11
Optical Time Domain Reflectometry (OTDR)
4.92
37.099998
42.5
24.4
3.739
15.101
1,387.099976
1,531.900024
2.33779
1.84145
13.18
1.822
2.049
1.82621
1.5737
-0.25251
SU-8
Air
1.627
3.097
Frequency Domain Reflectometry
4.94
48.299999
87
44.299999
6.678
6.502
1,485.800049
1,574.800049
2.30627
2.10835
7.85
0.677
1.135
1.97273
1.65087
-0.32186
Silicon Nitride (Si₃N₄)
Air
0.598
1.197
FDTD Simulation
4.47
61.400002
67.400002
30.700001
4.951
2.899
1,336.300049
1,611.800049
1.93274
1.84548
7.91
1.187
1.297
1.85904
1.59586
-0.26318
SU-8
Air
0.266
0.64
Frequency Domain Reflectometry
0.98
36.900002
47.099998
12.7
8.215
-0.305
1,342.800049
1,586.400024
2.14603
2.31584
17.370001
0.15
0.442
1.64392
1.47733
-0.16659
SU-8
Air
2.336
2.614
Optical Time Domain Reflectometry (OTDR)
4.59
36.299999
85.699997
2.5
7.428
9.942
1,305.599976
1,586.099976
1.57134
2.23703
1.1
0.201
0.454
1.50883
1.47112
-0.03771
Silicon Nitride (Si₃N₄)
Air
1.45
2.281
Frequency Domain Reflectometry
3.13
47.799999
58.200001
17.700001
7.973
-6.873
1,310.599976
1,571.800049
1.9478
1.55153
6.36
1.242
1.635
1.91496
1.88431
-0.03065
Silicon Nitride (Si₃N₄)
Air
2.998
3.405
Optical Time Domain Reflectometry (OTDR)
4.48
70.099998
13.8
7.8
7.054
-0.694
1,361.599976
1,540
2.01266
2.12589
12.53
1.934
2.232
1.61343
1.65916
0.04573
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.435
2.84
Ring Resonator Q-Factor
3.22
58
27.799999
20.6
5.85
6.68
1,351.099976
1,608.900024
2.22538
1.90696
18.35
1.087
1.12
1.81395
1.93625
0.1223
Silicon Nitride (Si₃N₄)
Air
1.293
1.984
FDTD Simulation
1.52
64.599998
15
42.099998
3.418
14.932
1,407.300049
1,615.400024
2.44831
2.21601
19.889999
0.572
0.665
1.50082
1.98323
0.48241
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
2.911
3.601
Ring Resonator Q-Factor
1.35
31.9
84.400002
27.799999
1.713
18.177
1,299.699951
1,534.199951
2.25641
2.14219
11.32
1.971
2.379
1.95163
1.42319
-0.52844
Polymethyl Methacrylate (PMMA)
Air
1.931
2.648
Ring Resonator Q-Factor
3.17
30.200001
54.299999
16.700001
0.625
10.695
1,408.900024
1,615.5
1.92675
1.79631
13.76
1.336
1.466
1.68899
1.89293
0.20394
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.802
3.018
FDTD Simulation
1.6
62.099998
16.6
43.700001
5.748
8.012
1,361.099976
1,607.599976
1.63304
2.12677
4.82
0.336
0.456
1.81541
1.46101
-0.3544
Polydimethylsiloxane (PDMS)
Air
1.335
1.476
Optical Time Domain Reflectometry (OTDR)
4.25
23
91.699997
31.6
6.695
-1.875
1,508.400024
1,547.300049
1.79264
2.41971
9.99
0.602
0.853
1.43791
1.96833
0.53042
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
2.713
3.036
Frequency Domain Reflectometry
1.56
40
86.900002
19
8.484
1.506
1,306.199951
1,534.5
1.85997
2.43378
9.14
0.962
1.337
1.95907
1.88699
-0.07208
Polymethyl Methacrylate (PMMA)
Air
2.822
3.073
Ring Resonator Q-Factor
3.77
46.099998
27
23.6
1.523
7.617
1,502
1,607
1.69775
2.16187
7.53
0.432
0.764
1.77509
1.55306
-0.22203
SU-8
Silicon Dioxide (SiO₂)
2.055
2.651
Frequency Domain Reflectometry
3.03
40.700001
70.800003
47
5.056
2.474
1,513.5
1,604.300049
1.90678
1.61015
10.56
1.614
1.755
1.80778
1.69852
-0.10926
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
2.485
3.46
Frequency Domain Reflectometry
3.73
66.699997
93.599998
43.099998
5.875
4.685
1,456.699951
1,580.800049
2.2856
2.12434
4.66
0.226
0.451
1.71764
1.86105
0.14341
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.634
1.833
Ring Resonator Q-Factor
0.58
57
49.799999
21.700001
5.761
-1.101
1,325.199951
1,597.5
2.44288
2.26834
10.59
0.598
0.984
1.51351
1.80214
0.28863
Polydimethylsiloxane (PDMS)
Air
1.039
1.285
Frequency Domain Reflectometry
3.46
24.4
96.199997
7.8
5.402
5.188
1,486
1,610.199951
2.05224
2.47881
2.28
1.285
1.444
1.75046
1.75713
0.00667
Silicon Nitride (Si₃N₄)
Air
1.766
2.081
Optical Time Domain Reflectometry (OTDR)
1.85
25.1
80.300003
40.400002
6.423
-4.143
1,429.300049
1,548.300049
1.95977
1.92904
6.03
0.419
0.648
1.71803
1.68139
-0.03664
SU-8
Air
0.284
1.028
FDTD Simulation
1.51
38.799999
81.699997
44.099998
4.775
1.255
1,345.900024
1,600.5
1.77286
2.09425
12.17
0.697
1.05
1.73701
1.70843
-0.02858
Silicon Nitride (Si₃N₄)
Air
0.751
0.973
Optical Time Domain Reflectometry (OTDR)
0.29
48.700001
31.299999
26.5
6.229
5.941
1,483.400024
1,552.699951
2.3263
2.09435
6.85
1.182
1.345
1.91178
1.42361
-0.48817
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.803
2.611
FDTD Simulation
3.16
72.699997
58.799999
49.799999
4.348
2.502
1,352
1,567.099976
2.2205
2.37593
11.8
0.59
0.732
1.573
1.93385
0.36085
Silicon Dioxide (SiO₂)
Air
0.253
1.706
Frequency Domain Reflectometry
2.49
69.599998
90.099998
5
7.55
4.25
1,355.5
1,573.699951
1.52264
1.79419
8.55
0.17
0.619
1.81224
1.79459
-0.01765
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.264
1.232
Frequency Domain Reflectometry
1.85
35
89.900002
28.200001
1.943
6.607
1,336.5
1,547.699951
1.50125
1.65472
16.370001
1.269
1.697
1.4186
1.78583
0.36723
Polydimethylsiloxane (PDMS)
Air
1.671
2.941
Frequency Domain Reflectometry
1.25
43.799999
34.400002
20.799999
4.642
11.728
1,455
1,545.699951
1.97725
1.8312
8.3
1.267
1.54
1.96265
1.5641
-0.39855
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.78
2.793
Frequency Domain Reflectometry
3.39
42.299999
12.7
40.900002
8.955
-0.655
1,428.599976
1,563.5
2.01507
2.44832
1.53
1.65
2.024
1.51509
1.9917
0.47661
Silicon Dioxide (SiO₂)
Air
1.089
1.86
Ring Resonator Q-Factor
1.26
31.5
78
22.9
5.107
-3.577
1,351.199951
1,534.800049
2.16476
1.65408
19.280001
0.111
0.51
1.91628
1.82785
-0.08843
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.632
2.044
FDTD Simulation
1.18
43.700001
66.900002
27.799999
8.077
11.203
1,459
1,622.300049
2.14616
2.31354
4.63
0.98
1.407
1.66445
1.50506
-0.15939
SU-8
Silicon Dioxide (SiO₂)
1.192
2.012
Frequency Domain Reflectometry
2.34
23.200001
10.6
3.5
2.756
1.874
1,429.300049
1,604.800049
1.50492
2.46601
3.79
1.231
1.607
1.71754
1.89539
0.17785
SU-8
Silicon Dioxide (SiO₂)
2.834
3.03
Optical Time Domain Reflectometry (OTDR)
0.7
61
77.300003
25.200001
1.666
2.124
1,478.599976
1,530.699951
2.33
2.25022
16.9
0.248
0.524
1.94358
1.90729
-0.03629
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
2.126
3.037
Optical Time Domain Reflectometry (OTDR)
3.54
54.599998
95.699997
4.7
8.85
8.05